Scanning electron microscopy image of a Si micro- needle made by wet etching in a basic solution using patterned thin silicon oxide (300 nm thick) as a mask to define the starting geometry. The oxide mask is still visible at the tip of the needle.
Scanning electron microscopy image of a Si micro- needle made by wet etching in a basic solution using patterned thin silicon oxide (300 nm thick) as a mask to define the starting geometry. The oxide mask is still visible at the tip of the needle.
